Item Tag: Mirrorcle Technologies
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Easy Drive MEMS Mirror Module (1mm – 6.4mm)
Easy Drive MEMS Mirror Module 1mm-6.4mm MEMS Mirror + Analog-Input MEMS Driver w/ Easy Drive Breakout PCBAMirrorcle P/N:EMMM142-AB/W/EP (1.0mm) | EMMM125-AB/W/EP (2.0mm) | EMMM110-AB/W/EP (4.6mm) | EMMM100-AB/W/EP (5.0mm) | EMMM160-AB/W/EP (6.4mm) Components:1x [Mirror P/N Varies] - Micromirror | MEMS Mirror | Scanning Mirror1x BDQ PicoAmp 5.x T180 (P/N: DR-11-055-00) - MEMS Driver - Analog Input1x "Easy Drive" PCB - Breakout and supporting circuits PCBA for MEMS Driver input2x 10-pin connection cables - 30cm, 1.27mm pitch + 5cm 1.27mm pitch1x USB Thumb Drive - User Guide Description of the MEMS Mirror ModuleThe MEMS Mirror Module or MMM is a module consisting of a Dual-Axis MEMS Mirror in a TINY48.4 connectorized package and a MEMS Driver - Analog Input, with a 10-pin ribbon cable between the driver and MEMS mirror Easy Drive MEMS Mirror Module (“EMMM”) comes with a breakout board for easier initial development, called Easy Drive 1.x. This breakout PCBA provides easier access to driver inputs, reduces the number of connections users must provide to get started, and protects the MEMS Mirror with appropriate waveform filtering and voltage limiting. The Easy Drive 1.x board has potentiometers that are tuned during calibration to map the ±10V analog inputs to limit the MEMS mirror to its max angular range (but not linearize response).An additional potentiometer is also on the Easy Drive 1.x to set the frequency of the FCLK signals (MEMS Driver inputs FCLK_X and FCLK_Y) appropriate for safe operation of the MEMS MirrorA toggle switch is on the Easy Drive 1.x to enable/disable the driverNOTE: Each Easy Drive breakout board is specifically tuned for a specific MEMS Mirror Module and should not be used with an MMM that it was not shipped for. Provided to drive the mirrors is Mirrorcle's proprietary "BDQ PicoAmp T180" Analog Input MEMS Driver. Use of the this Driver requires user's own hardware such as e.g.: data acquisition card (NIDAQ or similar), FPGA/MCU based embedded systems, or bench-top lab equipment. This MEMS Driver cannot be directly controlled via a software interface as it takes voltages as inputs. Easy Drive 1.x Breakout and Supporting Circuits PCBA For convenient experimentation with the driver and best protection for the MEMS Mirror, a convenient breakout PCBA is added in the bundle which includes necessary protections for the MEMS Mirror as well as convenient terminals and test points for easier connecting to the Driver connector. This, "Easy Drive PCB" includes a clock generating circuit for correctly setting the hardware filter clocks on the MEMS Driver to protect its respective MEMS Mirror from overshoot and oscillation. Additionally, Easy Drive PCB has preset resistors to calibrate the ±10V input to match the full angular range of the MEMS mirror and prevent users from applying voltage above manufacturer-specified limits. All of these circuits have preset potentiometers which are epoxied during calibration; however, a highly experienced/advanced user can break the epoxy seal and adjust the filter cutoff frequencies as well as voltages - or bypass the PCB altogether and use the MEMS Mirror Module directly at the MEMS Driver's input port. Easy Drive 1.x provides a breakout for the input of the MEMS driver and assists users in providing all the necessary signals for the MEMS Driver to safely control the MEMS Mirror. It is designed to easily interface with any Data Acquisition (DAQ) card with ±10V Analog Outputs and a +5VDC supply, or alternately, with benchtop function generators and power supplies.Each pin of the 10-pin connector has its own screw terminal, hook, and hole connection with easy to read labels. The Easy Drive 1.x allows the user to quickly enable high voltage to the driver with a simple switch.INPUT: Screw terminals, test points, connect pins - multiple options for easy connections.NOTE: Some of the inputs are driven by on-board circuitsOUTPUT: 10-pin header connector (1.27mm, 2 rows, right angle) which is directly connected to MEMS Drivers of version 5.xThe MEMS Mirror, MEMS Driver, and Easy Drive PCBA are provided as a complete Easy Drive MEMS Mirror Module, with the connectors lightly epoxied to secure their connections and prevent accidental mix-up of those paired items. In general, it is not recommended to separate them. Bundle multiple MEMS Mirror Modules for more quantity discounting! Mirrorcle's scanning MEMS mirrors have two-axis (2D) point-to-point (quasi-static) capability to point to and stop at any angle in their specified range, or run broadband patterns such as triangle waveforms, linear rasters, vector graphics, etc. In other words they allow beam steering to arbitrary positions and at arbitrary beam velocities up to the bandwidth limit. In simplest driving mode when on-board low-pass filters are set to smoothen drive waveforms, the mirror operates with that limited bandwidth of movement in both axes. In advanced driving schemes where user can avoid overshoot and resonant response through more advanced control methods, a much larger bandwidth can be harnessed. Robust two-axis MEMS Mirrors are generally vibration and shock tolerant even with the largest 6.4mm diameter mirror, however they should still be handled with great care as is the case with any other precision optical components. Larger mirrors are more sensitive to shock and vibrations as expected. Target Applications:Solid State Lidar (MEMS Lidar)Free Space Optical CommunicationsBiomedical Imaging (OCT, Multiphoton, Confocal, etc)3D Scanning and Metrology3D Positional/Rotational TrackingLaser marking and 3D printingEye Tracking / Gaze Sensing / Foveated Rendering (AR/VR) FEATURES AND SPECIFICATIONS BY MODULE MEMS Mirror Module - 1.0mm Mirror (EMMM142-AB/W/EP) A7M10.2-1000AL-TINY48.4-AB/W/EPFeatures and Specifications:Gimbal-less Dual-Axis MEMS Mirror1.0mm diameter, Aluminum CoatedMechanical Angle Range ±4.7° (±2%)1st Resonant Frequency: >4.4 kHzBandwidth (to -3dB point): ~7kHz Step Response: 1200 HzBandwidth (to -3dB point): 2000 Hz Step Response: ~2.5ms (non-optimized drive with filtered step)Recommended LPF (waveform filter) for point-to-point operation: 400HzConnectorized Package: TINY48.4 (20mm x 15mm)BDQ PicoAmp 5.x - T180 (P/N: DR-11-055-00) (features and specifications below) MEMS Mirror Module - 4.6mm Mirror (EMMM110-AB/W/EP) A8L2.2-4600AL-TINY48.4-AB/W/EPFeatures and Specifications:Gimbal-less Dual-Axis MEMS Mirror4.6mm diameter, Aluminum CoatedMechanical Angle Range ±4.8° (±2%)1st Resonant Frequency: >300HzBandwidth (to -3dB point): ~550Hz Step Response: ~4.5ms (non-optimized drive with filtered step)Recommended LPF (waveform filter) for point-to-point operation: 120HzConnectorized Package: TINY48.4 (20mm x 15mm)BDQ PicoAmp 5.x - T180 (P/N: DR-11-055-00) (features and specifications below) MEMS Mirror Module - 5.0mm Mirror (EMMM100-AB/W/EP) A8L2.2-5000AL-TINY48.4-AB/W/EPFeatures and Specifications:Gimbal-less Dual-Axis MEMS Mirror5.0mm diameter, Aluminum CoatedMechanical Angle Range ±5° (±2%, max. limit 5.4°)1st Resonant Frequency: >260HzBandwidth (to -3dB point): ~500Hz Step Response: ~5ms (non-optimized drive with filtered step)Recommended LPF (waveform filter) for point-to-point operation: 120HzConnectorized Package: TINY48.4 (20mm x 15mm)BDQ PicoAmp 5.x - T180 (P/N: DR-11-055-00) (features and specifications below) MEMS Mirror Module - 6.4mm Mirror (EMMM160-AB/W/EP) A5L2.2-6400AL-TINY48.4-AB/W/EPFeatures and Specifications:Gimbal-less Dual-Axis MEMS Mirror6.4mm diameter, Aluminum CoatedMechanical Angle Range ±1.15° (±2%, max. limit 1.26°)1st Resonant Frequency: 650-800HzBandwidth (to -3dB point): ~1100Hz Step Response: ~3.5ms (non-optimized drive with filtered step)Recommended LPF (waveform filter) for point-to-point operation: 300HzConnectorized Package: TINY48.4 (20mm x 15mm)BDQ PicoAmp 5.x - T180 (P/N: DR-11-055-00) (features and specifications below) MEMS Driver - Analog Input: Features and SpecificationsBDQ PicoAmp 5.x - T180 (P/N: DR-11-055-00) Features and Specifications:Low voltage supply and low power consumption (100G) - Recommended not to exceed above listed mechanical angle and drive voltages. Beyond those operation limits the device may be damaged or destroyed. - Always perform tests that include any new settings - such as new drawings, new refresh rates, new filter settings - at low voltage settings until you can verify that those settings are working properly and not exciting the device beyond its mechanical limits. - Recommend to pre-filter (LPF) waveforms supplied to mirror as recommended above to avoid overshoot/ringing and excessive angle response. - Removal of window can easily result in damage of the micro mechanical unit. Window should not be removed or tampered with, and should not be touched to maintain best optical quality. No liquids should be used in any way with the device (e.g. to clean it) as they will enter cavity and destroy device. Shipping and Delivery 1. Our shipping rates include the cost of shipping, handling, packaging and related manpower costs. 2. Usually items send out within 10 working days after receiving cleared payment. Payment Methods 1. We only accept PayPal2. After you have placed the order, an email will be sent to your eBay registered email address.3. If you are paying through Paypal using eCheck, note that your item can be shipped only after eCheck has cleared.4. All payments are expected within 7 days after the order is placed. A non-payment dispute will be opened if full payment is not received. Warranty and Return PolicySOLD AS-IS. See images for more details.Without any warranty.Without refund. Tax PolicyInternational Buyers Please Note:1. Import duties, taxes, and charges are not included in the item price or shipping cost. These charges are the buyer's responsibility.2. Please check with your country's customs office to determine what these additional costs will be prior to bidding or buying.3. If you have any request for customs clearance, please leave a note when you order.
July 5, 2026