TEL Tokyo Electron MC-31039B REV 1E GAS PCB Assy for TS-4000Z-16 Control Unit TEL Tokyo Electron MC-31039 GAS Circuit Board for TS4000Z-16 Control UnitTEL Part No: 1181-000450-14 Used, functional units as removed from TEL system. Listing and template services provided by inkFrog byJuly 4, 2026